Plasma Processes and Polymersжурнал

Статьи, опубликованные в журнале

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  • 2024 Challenges in scaling of IPVD deposited Ta barriers on OSG low-k films: Carbonization of Ta by CHx radicals generated through VUV-induced decomposition of carbon-containing groups
  • Ryabinkin Alexey N., Vishnevskiy Alexey S., Naumov Sergej, Serov Alexander O., Maslakov Konstantin I., Seregin Dmitry S., Vorotyntsev Dmitry A., Pal Alexander F., Rakhimova Tatyana V., Vorotilov Konstantin A., Baklanov Mikhail R.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 21, № 5 DOI
• • 2024 Hydrogen production in microwave discharge in water with barbotage of methane at atmospheric pressure: Experiment and modeling
  • Batukaev Т.S., Bilera I.V., Krashevskaya G.V., Epstein I.L., Lebedev Yu A., Tatarinov A.V., Titov A.Yu
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany) DOI
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  • 2023 Damage to OSG low‐ k films during IPVD deposition of the Ta barrier layer
  • Serov Alexander O., Ryabinkin Alexey N., Vishnevskiy Alexey S., Naumov Sergej, Pal Alexander F., Rakhimova Tatyana V., Seregin Dmitry S., Vorotilov Konstantin A., Baklanov Mikhail R.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 20, № 4 DOI
• • 2023 Hydrogen production in microwave discharge in water solutions of ethanol at atmospheric pressure
  • Batukaev Тimur S., Bilera Igor V., Krashevskaya Galina V., Lebedev Yuri A., Epstein Iren L.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 20, № 6 DOI
• • 2023 Hydrogen production in microwave discharge in water solutions of ethanol at atmospheric pressure
  • Batukaev Тimur S., Bilera Igor V., Krashevskaya Galina V., Lebedev Yuri A., Epstein Iren L.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 20, № 6 DOI
• • 2022 Time resolved study of ignition of microwave discharge in liquid hydrocarbons
  • Lebedev Yuri A., Krashevskaya Galina V., Batukaev Timur S., Mikhaylyuk Andrey V.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 19, № 5 DOI
• • 2021 Light emission from microwave discharges in liquid hydrocarbons at the initial stages of their development
  • Lebedev Yuri A., Krashevskaya Galina V., Batukaev Timur S., Epstein Irene L.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 18, № 10 DOI
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  • 2021 Non‐self‐sustained electron beam RF‐generated plasma in application for functional surface pretreatment
  • Palov A.P., Proshina O.V., Rakhimova T.V., Rakhimov A.T., Voronina E.N.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 18, № 7, с. 1-15 DOI
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  • 2020 Optical emission spectra of microwave discharge in different liquid hydrocarbons
  • Lebedev YA, Shakhatov VA
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), с. e2000003-e2000003 DOI
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  • 2020 Pore sealing mechanism in OSG low- k films under ion bombardment
  • Voronina E.N., Sycheva A.A., Lopaev D.V., Rakhimova T.V., Rakhimov A.T., Proshina O.V., Voloshin D.G., Zyryanov S.M., Zotovich A.I., Mankelevich Y.A.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), № 2, с. 1-15 DOI
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  • 2019 Microwave discharge in liquid n-heptane with and without bubble flow of argon
  • Averin K.A., Bilera I.V., Lebedev| Y.A., Shakhatov V.A., Epstein I.L.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), с. 1800198 DOI
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  • 2018 Synergistic effect of VUV photons and F atoms on damage and etching of porous organosilicate film
  • Lopaev D.V., Zyryanov S.M., Zotovich A.I., Rakhimova T.V., Mankelevich Yu A., Rakhimov A.T., Baklanov M.R.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 15, № 4, с. 1-9 DOI
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  • 2017 Nanosize carbon products formed in microwave discharge in liquid alkanes
  • Averin Konstantin A., Lebedev Yuri A., Shchegolikhin Alexander N., Yablokov Michael Yu
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), с. 201600227 DOI
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  • 2017 Nanosize carbon products formed in microwave discharge in liquid alkanes
  • Averin Konstantin A., Lebedev Yuri A., Shchegolikhin Alexander N., Yablokov Michael Yu
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 14, № 9, с. 1600227 DOI
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  • 2017 Photoabsorption and damage of OSG low-k films by VUV emission at 140-160 nm
  • Lopaev D.V., Rakhlinsky V.V., Zyryanov S.M., Mankelevich Yu A., Rakhimova T.V., Kurchikov K.A., Baklanov M.R.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), с. e1700166 DOI
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  • 2016 Modeling of Single and Dual Frequency Capacitive Discharge in Argon Hydrogen Mixture - Dynamic Effects and Ion Energy Distribution Functions
  • Voloshin Dmitry G., Mankelevich Yuri A., Proshina Olga V., Rakhimova Tatyana V.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 13 DOI
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  • 2014 Role of the Charged Particles in Bacteria Inactivation by Plasma of a Positive and Negative Corona in Ambient Air
  • Sysolyatina Elena, Mukhachev Andrey, Yurova Maria, Grushin Michael, Karalnik Vladimir, Petryakov Alexander, Trushkin Nikolay, Ermolaeva Svetlana, Akishev Yuri
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 11, № 4, с. 315-334 DOI
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  • 2011 Thin Metal Film Deposition on Microparticles Trapped in RF Magnetron Discharge Plasma
  • Rudavets Alexander G., Ryabinkin Alexey N., Serov Alexander O.
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 8, № 4, с. 346-352 DOI
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  • 2009 New antimicrobial materials based on polymers with nanostructured surface modified by organic fullerene [60] derivatives
  • Ellinson V.M.a, Yurovskaya M.A.b, Lyamin A.N.a, Ovchinnikova N.S.b, Naumkin A.V.c
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 6, № SUPPL. 1, с. 85
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  • 2005 DCM Production in a Dusty-Plasma Trap
  • Ivanov A., Mitin V., Pal A., Ryabinkin A., Serov A., Skryleva E., Starostin A., Fortov V., Shulga Yu
  • в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), с. 455-464