Krivtsun V.M.
Количество цитирований статей в журналах по данным
Web of Science: 62,
Scopus: 59
IstinaResearcherID (IRID): 468384
Деятельность
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Статьи в журналах
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2018
Plasma-assisted oxide removal from ruthenium-coated EUV optics
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Dolgov A.,
Lee C.J.,
Bijkerk F.,
Abrikosov A.,
Krivtsun V.M.,
Lopaev D.,
Yakushev O.,
van Kampen M.
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в журнале Journal of Applied Physics, издательство AIP Publishing (United States), том 123, с. 153301
DOI
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2017
Numerical simulations based on probe measurements in EUV-induced hydrogen plasma
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Abrikosov A.,
Reshetnyak V.,
Astakhov D.,
Dolgov A.,
Yakushev O.,
Lopaev D.,
Krivtsun V.
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в журнале Plasma Sources Science and Technology, издательство IOP Publishing ([Bristol, UK], England), том 26, с. 045011
DOI
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2015
Plasma probe characteristics in low density hydrogen pulsed plasmas
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Astakhov D.I.,
Goedheer W.J.,
Lee C.J.,
Ivanov V.V.,
Krivtsun V.M.,
Zotovich A.I.,
Zyryanov S.M.,
Lopaev D.V.,
Bijkerk F.
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в журнале Plasma Sources Science and Technology, издательство IOP Publishing ([Bristol, UK], England), том 24, № 5, с. 055018
DOI
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2014
Comparison of H 2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
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Dolgov A.,
Lopaev D.,
Rachimova T.,
Kovalev A.,
Vasil’eva A.,
Lee C.J.,
Krivtsun V.M.,
Yakushev O.,
Bijkerk F.
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в журнале Journal of Physics D - Applied Physics, издательство IOP Publishing ([Bristol, UK], England), том 47, № 6, с. 065205
DOI
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2012
Removal of amorphous C and Sn on Mo:Si multilayer mirror surface in Hydrogen plasma and afterglow
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Braginsky O.V.,
Kovalev A.S.,
Lopaev D.V.,
Malykhin E.M.,
Rakhimova T.V.,
Rakhimov A.T.,
Vasilieva A.N.,
Zyryanov S.M.,
Koshelev K.N.,
Krivtsun V.M.,
van Kaampen Maarten,
Glushkov D.
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в журнале Journal of Applied Physics, издательство AIP Publishing (United States), том 111, № 9, с. 093304-093304
DOI
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2011
Loss of Hydrogen Atoms in H-2 Plasma on the Surfaces of Materials Used in EUV Lithography
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Zyryanov S.M.,
Kovalev A.S.,
Lopaev D.V.,
Malykhin E.M.,
Rakhimov A.T.,
Rakhimova T.V.,
Koshelev K.N.,
Krivtsun V.M.
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в журнале Plasma Physics Reports, издательство Maik Nauka/Interperiodica Publishing (Russian Federation), том 37, № 10, с. 881-889
DOI
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Статьи в сборниках
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2010
In-Line Plasma Cleaning of EUV Multilayer Mirrors
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Malykhin E.M.,
Braginsky O.V.,
Kovalev A.S.,
Lopaev D.V.,
Rakhimov A.T.,
Rakhimova T.V.,
Vasilieva A.N.,
Zyryanov S.M.,
Koshelev K.N.,
Krivtsun V.M.,
Yakushev O.F.
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в сборнике Bulletin of the American Physical Society, 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas, October4-8 2010, Paris, France, серия 7, место издания Paris, France, том 55
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Патенты