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Тезисы докладов
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- 2018 High-rate high-density ICP etching of germanium
- Lagov P.B., Maslovsky V.M., Pavlov Yu S., Rogovsky E.S., Drenin A.S., Skryleva E.A., and Lednev A.M.
- в сборнике XII-th International Conference Ion Implantation And Other Applications Of Ions And Electrons 18–21 June 2018, место издания Kazimierz Dolny, Poland, тезисы, с. 107-107