XII-th International Conference Ion Implantation And Other Applications Of Ions And Electrons 18–21 June 2018сборник

Статьи, опубликованные в сборнике

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  • 2018 High-rate high-density ICP etching of germanium
  • Lagov P.B., Maslovsky V.M., Pavlov Yu S., Rogovsky E.S., Drenin A.S., Skryleva E.A., and Lednev A.M.
  • в сборнике XII-th International Conference Ion Implantation And Other Applications Of Ions And Electrons 18–21 June 2018, место издания Kazimierz Dolny, Poland, тезисы, с. 107-107
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  • 2018 Lifetime control of silicon devices by proton and carbon implantation
  • Lagov P.B., Kulevoi T.V., Maslovsky V.M., Andreev D.V., Volkov A.N.
  • в сборнике XII-th International Conference Ion Implantation And Other Applications Of Ions And Electrons 18–21 June 2018, место издания Kazimierz Dolny, Poland, тезисы, с. 106-106