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The Effect of Ion Beam Etching on Mechanical Strength Multilayer Aluminum Membranesстатья
- Авторы: Gusev Evgeney E., Borisova Anna V., Dedkova Anna A., Salnikov Anton A., Kireev Valeri Yu
- Сборник: 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)
- Год издания: 2019
- Место издания: IEEE
- Первая страница: 1990
- Последняя страница: 1994
- Аннотация: Experimental study of aluminum membranes on a silicon substrate was conducted. Different combinations of Al layers were formed by magnetron method. Thickness has been determined by scanning electron microscope and secondary ion mass spectrometer. The distribution of atoms in the depth of the material was shown. The border between single layers of aluminum was detected. The dependence of the surface roughness on the number of membrane layers was given. A method for assessing the mechanical strength of circular membranes has been developed. Influence of ion beam etching process on membrane mechanical strength investigated.
- Добавил в систему: Дедкова Анна Александровна