Evaluation of Mechanical Properties of Porous OSG Films by PFQNM AFM and Benchmarking with Traditional Instrumentationстатья
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Дата последнего поиска статьи во внешних источниках: 24 сентября 2020 г.
Аннотация:Characterization of mechanical properties of thin porous films with nanoscale resolution remains a challenge for instrumentation science. In this work, AFM in the PeakForce Quantitative Nanomechanical Mapping (PFQNM) mode is used for Young’s modulus measurements of porous OSG films. The test samples were prepared by sol-gel techniques with the use of silicon alkoxide and methyl-modified silicon alkoxide to prepare the films with different CH3/Si ratio. The films porosity was engineered by using Brij® 30 template and Evaporation-Induced Self-Assembly (EISA) technique. The chemical composition, pore structure and their modification during air storage and thermal annealing was studied by using FTIR spectroscopy and ellipsometric porosimetry (EP). Since PFQNM AFM was first used for evaluation of Young’s modulus of thin porous films, the obtained results are benchmarked using Nanoindentation, Surface Acoustic Wave (SAW) spectroscopy and EP. The results have a good agreement with each other but PFQNM and NI give slightly larger values than SAW and EP. The difference is in agreement with previously reported data and reflects different physical meaning of the obtained values. It is shown that presence of physically adsorbed water strongly influences the results generated by PFQNM AFM and, therefore, reliable water removal from the studied materials is necessary.