Chemical Vapour DepositionProceedings of the Fourteenth International Conference and EUROCVD-11, ed. by M.Allendorf, C.Bernard,сборник
Статьи, опубликованные в сборнике
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1997
A new approach to modeling evaporation kinetic of volatile coordination compounds used as mocvd precursors
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Kuzmina N.,
Chemleva T.,
Isaeva E.,
Iljina E.,
Korsakov I.,
Chugarov N.,
Wahl G.
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в сборнике Chemical Vapour DepositionProceedings of the Fourteenth International Conference and EUROCVD-11, ed. by M.Allendorf, C.Bernard,, серия Electrochemical Society Proceedings, место издания The Electrochemical Society, Inc Pennington, NJ, USA, том 97, с. 893-900