59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USAсборник
Статьи, опубликованные в сборнике
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2006
Capacitive Coupled Single- and Dual-Frequency RF Plasma in Argon
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Proshina O.V.,
Braginsky O.V.,
Ivanov V.V.,
Kovalev A.S.,
Lopaev D.V.,
Rakhimova T.V.,
Vasilieva A.N.
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в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA
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2006
Experimental and Theoretical Study of Ion Energy Distribution Function in the Single and Dual Frequency Capacitive Coupled RF Discharge in Argon Plasma
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Braginsky O.V.,
Kovalev A.S.,
Lopaev D.V.,
Mankelevich Yu A.,
Olevanov M.A.,
Proshina O.V.,
Rakhimova T.V.,
Vasilieva A.N.,
Voloshin D.G.
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в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA
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2006
High Efficiency Singlet Oxygen Generator (SOG) Based on RF Discharge
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Proshina O.V.,
Braginsky O.V.,
Kovalev A.S.,
Lopaev D.V.,
Mankelevich Yu A.,
Olevanov M.A.,
Rakhimova T.V.,
Vasilieva A.N.
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в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA
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2006
Investigation of the Spatial Distribution Evolution of Electron Temperature in Capacitive Coupled Single- and Dual-Frequency RF Plasmas in Ar/O2 mixture over the RF Period
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Belostotsky S.G.,
Braginsky O.V.,
Kovalev A.S.,
Lopaev D.V.,
Rakhimova T.V.,
Vasilieva A.N.
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в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA
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2006
Possible Mechanism of “Additional” Production of Hydrogen Negative Ions in a H2 Glow Discharge
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Belostotsky S.G.,
Economou D.J.,
Lopaev D.V.,
Rakhimova T.V.
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в сборнике 59-th Annual Gaseous Electronics Conference (GEC), 10-13 October 2006, Columbus, Ohio, USA, место издания Columbus, Ohio, USA