Plasma Etch and Strip in Microthechnology (PESM 2017). Book of abstracts. October 20–21, 2017, Leuven, Belgiumсборник
Статьи, опубликованные в сборнике
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2017
DFT simulations of fluorine and chlorine atoms and molecules interactions with MoS2 monolayer
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Voronina E.,
Mankelevich Yu,
Rakhimova T.,
Heyne M.,
Marinov D.,
de Marneffe J.F.
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в сборнике Plasma Etch and Strip in Microthechnology (PESM 2017). Book of abstracts. October 20–21, 2017, Leuven, Belgium, место издания IMEC Leuven, Belgium, тезисы