Proceedings of SPIE, Proceedings Volume 11022, International Conference on Micro- and Nano-Electronicsсборник
Статьи, опубликованные в сборнике
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2019
The opportunities of Rutherford backscattering spectroscopy for analysis of multilayer nanometer thin film structures
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Bachurin V.,
Churilov A.,
Melesov N.,
Parshin E.,
Rudy A.,
Trushin O.
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в сборнике Proceedings of SPIE, Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics, серия International Conference on Micro- and Nano-Electronics, издательство SPIE (Bellingham, WA, United States), том 11022, с. 110221I
DOI