Bulletin of the American Physical Society, 64th Annual Gaseous Electronics Conference, том 56, № 16, с. 75сборник
Статьи, опубликованные в сборнике
-
-
-
2011
Calculation of 2D charged particles density distributions and current-voltage characteristics of RF CCP discharge by means of Galerkin method
-
Dvinin S.,
Park W.T.,
Kalinin A.,
Kashaba A.,
Nikishin N.
-
в сборнике Bulletin of the American Physical Society, 64th Annual Gaseous Electronics Conference, том 56, № 16, с. 75, том 56, тезисы, с. 80