Enhanced dielectric properties of SrTiO3 epitaxial thin film for tunable microwave devicesстатья
Статья опубликована в высокорейтинговом журнале
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Дата последнего поиска статьи во внешних источниках: 22 декабря 2017 г.
Аннотация:The performance of tunable microwave devices based on heteroepitaxial YBa2Cu3Ox/SrTiO3 films on (001)LaAlO3 substrates has been evaluated. It was ascertained that "out-of-plane" SrTiO3 lattice parameter is the relevant factor in determining both device agility and dielectric loss. After high temperature annealing (1100°C, 1 atm O2 ), only SrTiO3 layers deposited under low oxygen pressure (∼10-5 Torr) show an appreciable reduction of the dielectric losses while maintaining high agility. Annealed samples exhibit voltage independent losses of ∼5×10-3 simultaneously with 55% dielectric agility at 6 GHz and 77 K.