Influence of small additives of nitrogen in 1D-modeling of non-uniform microwave discharge of low pressure in hydrogenстатья
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Дата последнего поиска статьи во внешних источниках: 6 февраля 2018 г.
Аннотация:A one-dimensional simulation for studying the influence of small additives of
nitrogen to the parameters and structure of non-uniform microwave discharge in hydrogen at
pressure of 1 Torr has been performed. It is shown that the profiles of the electron density and
microwave field are affected by changes both in the EEDF and in the ionic constituent of the
plasma. The EEDF influences in a spherical region of the discharge (away from the central
electrode). The addition of nitrogen increases the mobility of electrons and leads to reduction
of size of the plasma formation. The change in the ion components of plasma (N2H+ becomes
the main ion) affects the structure of the plasma near the surface of the electrode.