|
ИСТИНА |
Войти в систему Регистрация |
Интеллектуальная Система Тематического Исследования НАукометрических данных |
||
Comparison of Power Absorption Ability of Ar and O2, N2 Plasma of RF Inductive Dischargeстатья
Информация о цитировании статьи получена из
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 1 октября 2025 г.
- Авторы: Chen G., Kralkinaa E.A., Dvinin S.A., Nikonov A.M., Vavilin K.V., Zadiriev I.I., Duan W.X., Fang S.D., Shen J., Wu Z.
- Журнал: Plasma Physics Reports
- Том: 51
- Номер: 3
- Год издания: 2025
- Издательство: Maik Nauka/Interperiodica Publishing
- Местоположение издательства: Russian Federation
- Первая страница: 357
- Последняя страница: 364
- DOI: 10.1134/S1063780X24602165
- Аннотация: The measurements of the RF power absorption efficiency have been performed in the pressurerange of argon in the range of 1 × 10–3–0.7 Torr, oxygen pressures in the range of 8 × 10–4–0.05 Torr, nitrogen pressure 3 × 10–3–4 × 10–2 Torr at the operating frequency of 4 MHz. In argon the efficiency of RF generator power coupling to plasma in the considered pressure range weakly increases with increasing argon pressure. In oxygen and nitrogen plasma at powers below 500 W the RF power coupling efficiency depends nonmonotonically on pressure. The admixture of even small amount of oxygen to argon discharge leads to thedecrease of RF power coupling efficiency at high Ar pressure and RF generator power below 400 W. Adecrease in the fraction of RF generator power absorbed by the plasma under pressure growth leads to adecrease in the plasma density and discharge disruption. Thus, the area of existence of the discharge appearsto be limited on the high-pressure side. The higher is the RF generator power, the wider is the range of pressures at which the RF inductive discharge can exist. The numerical simulation showed that the observedexperimental facts were due to the peculiarities of the dependence of equivalent plasma resistance on electrondensity and frequency of electron collisions with heavy particles.
- Добавил в систему: Кралькина Елена Александровна