Angular-distributions of sputtered particles from lithium-implanted aluminum and copper-crystalsстатья
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Аннотация:The anisotropy of angular distributions of sputtered ions from lithium-implanted aluminium and copper single crystals, measured by SIMS analysis, have been used to obtain information about the microstructure of the implanted layers. Sputtered Al+ distributions from the {111} surface show three-fold symmetry with maximum intensity near the <110> and <100> directions respectively, while Li+ distributions show maximum intensity only in the <100> directions. From {100} crystals the Al+ distributions have four-fold symmetry while there are no preferential ejection directions for the Li+ ions. This agrees conceptually with the fact that the implanted layer contains the ordered Al3Li (delta') phase, which has earlier been observed by TEM analysis on implanted samples. In contrast, a similar study of Li+ implanted copper crystals shows that the implanted lithium is randomly located.