Аннотация:We report an approach to stabilize electrochemical performance of silicon- and germanium-based thin film anodes by using carbon nanowall matrix. Silicon and germanium layers were deposited onto vertically oriented carbon nanowall scaffolds and this procedure has been repeated for multiple times producing multilayered structures with increased silicon and germanium areal mass loading. It was demonstratedthat the areal specific capacity of multilayered anodes achieves up to 2 mAh/cm2 without a penalty to cycling stability. Based on post mortem SEM analysis of the electrodes we speculate that the reason for improved cycling stability of multilayered highly-loaded silicon/graphene composites is the ability to relax the mechanical stresses in the films.