Physical Properties of a Low-Power Helicon Source Operating on a High-Frequency Discharge with a Capacitive Componentстатья
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Дата последнего поиска статьи во внешних источниках: 20 февраля 2024 г.
Аннотация:The results of an experimental study of a low-power RF plasma source placed in a longitudinalmagnetic field (helicon thruster), when it operates on a capacitive RF discharge and inductive RF dischargeswith a capacitive component, are presented. A significant dependence of the characteristics of the ion andelectron fluxes of the source on the induction of a constant magnetic field is shown. The fundamental applicability of capacitive RF discharge as a working process in the studied plasma source is demonstrated. It isshown that the increase in the average energy of ions in the flow at the outlet of the source with the appearance of the capacitive component of the discharge is slight.