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Интеллектуальная Система Тематического Исследования НАукометрических данных |
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CVD of high Tc superconductorsстатья
- Авторы: Decker W., Nurnberg A., Pulver M., Stolle R., Wahl G., Erokhin Yu, Gorbenko O., Graboy I., Kaul A., Sommer M., Vogt U.
- Сборник: CVD- XII. Proceedings of the Twelfth International Symposium on Chemocal Vapor Deposition. June, 1993, Honolulu, USA
- Год издания: 1993
- Место издания: THE ELECTROCHEMICAL SOCIETY, INC 10 South Main St., Pennington, NJ 08534-2896
- Первая страница: 264
- Последняя страница: 275
- Аннотация: For industrial CVD of Y1Ba2Cu30678+ superconductors single source evaporation systems are preferred. After a comparison of different evaporation systems the deposition process with an ultrasonic nebulizer is described. A solution of thd complexes in diglyme was nebulized and evaporated in a heated tube. The deposition process was carried out with the following deposition parameters: 0.20 mol/h diglyme with 0.03 mol/l thd-complexes (thd = 2.2.6.6.-tetramethyl-3.5-heptanedionate), 1.5 mol/h 02, 0.13 mol/h Ar. The total pressure was 2000 - 2500 Pa and the deposition temperature in the range of 800 - 950°C. The deposition process is controlled by gas transport as is indicated by the small temperature dependence of the depostion process and the good agreement of the calculated and measured deposition profiles in a cylindrical hole. Carbon (some wt%) was found in the coatings. The maximum transition temperature was 79 K. In comparison experiments with a direct spray process into the reactor are described.
- Добавил в систему: Грабой Игорь Эдвинович