Microwave discharge on external surface of quartz plate

Авторы: Shibkov V.M., Chernikov V.A., Dvinin S.A., Ershov A.P.
Сборник: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) / MICRO- AND NANOELECTRONICS 2003
Том: 5401
Год издания: 2004
Место издания: Zvenigorod, RUSSIA
Первая страница: 47
Последняя страница: 54
DOI: 10.1117/12.556992
Аннотация: A new way of creation of the stable and constantly reproduced at various experiments surface microwave discharge near a flat dielectric antenna was developed and experimentally investigated at a wide range of air pressure p=10(-3)divided by10(3) torr. The breakdown characteristics determining a threshold of a surface microwave discharge appearance were studied. Longitudinal size and velocity of spreading of a surface microwave discharge in air were determined at a wide range of gas pressure, microwave power and pulse duration. The spatial-temporary evolution of electron density, gas and vibrational temperatures were investigated. It is shown that the surface microwave discharge can be used as a plasma source for microelectronics and material processing.
Добавил в систему: Двинин Сергей Александрович

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