Elimination of cumulative effect of thickness errors in monochromatic monitoring of optical coating production: theoryстатья
Статья опубликована в высокорейтинговом журнале
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:We propose an algorithm for correcting deposition termination levels that allows elimination of the cumulative effect of errors in previously deposited layers. For the application of this algorithm at least one monitoring signal extremm should be registered during a layer deposition. We also derive a theoretical relation for the estimation of errors in layer refractive indices based on the results of on-line monitoring measurements. At least two monitoring signal extrema are required for its application.
(c) 2007 Optical Society of America.