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Effect of substrate temperature on properties of diamond-like films deposited by combined DC impulse vacuum-arc methodстатья
Статья опубликована в высокорейтинговом журнале
Статья опубликована в журнале из списка Web of Science и/или Scopus- Авторы: Zavaleyev V., Walkowicz J., Greczynski G., Hultman L.
- Журнал: Surface and Coatings Technology
- Том: 236
- Год издания: 2013
- Издательство: Elsevier BV
- Местоположение издательства: Netherlands
- Первая страница: 444
- Последняя страница: 449
- DOI: 10.1016/j.surfcoat.2013.10.023
- Аннотация: DLC thin films have been deposited using a combined DC and high power impulse vacuum-arc process. Hardness and adhesion of the obtained films deposited at different substrate temperature were studied using nanohardness testing and the scratch tester REVETEST®. The bonding structure of as-deposited films was ana- lyzed by Raman scattering and X-ray photoelectron spectroscopy. The results show that the substrate tempera- ture is one of the main parameters influencing the sp3-to-sp2 ratio of carbon atom bonds in the coatings, which in turn affects the film's mechanical properties. XRD analysis shows that a CrxCy interfacial layer forms at 280 °С, which reduces the adhesion properties of the DLC coatings. High quality DLC coatings are obtained by control of the specimen temperature below 280 °C using a sensor that is in direct contact with the substrate.
- Добавил в систему: Завалеев Виктор Анатольевич