Аннотация:A study and comparative analysis of the mechanical properties of the surface layers of nickel witha sputtered aluminum film, depending on the dose of argon ion irradiation, has been performed. It is revealed that the hardness and the reduced elastic modulus at an indentation depth of 400 nm does not change and remains constant within the permissible measurement error. However, when the penetration depth of the diamond nanotip is 40 nm, the hardness, the reduced elastic modulus, and the stiffness of the samples irradiated with a dose of 1017 ions/cm2increase significantly