|
ИСТИНА |
Войти в систему Регистрация |
Интеллектуальная Система Тематического Исследования НАукометрических данных |
||
Large area laser parallel fabrication of user-defined nanopatterns by particle-lens arraysстатья
- Авторы: Wei Guo, Wang Zeng Bo, Li Lin, Liu Zhu, Luk’yanchuk Boris, Whitehead David J.
- Сборник: International Congress on Applications of Lasers & Electro-Optics
- Год издания: 2007
- Издательство: Laser Institute of America
- Местоположение издательства: United States
- DOI: 10.2351/1.5061164
- Аннотация: Direct parallel writing nano-patterns over a large surface area is a challenging task. Techniques like electron beam and focused ion beam lithography are limited to particular applications because of low throughput and expensive setup. In this paper, an efficient and low-cost technique is reported on direct laser surface nanopatterning in the near-field region. By using angular incident laser beams with a self-assembled particle-lens array, flexible patterns have been produced by a few laser pulse exposures. It was demonstrated that hundred million parallel features can be written simultaneously in an area of one centimeter square.
- Добавил в систему: Лукьянчук Борис Семенович