Аннотация:Ensembles of silver nanoparticles (NPs) with various sizes deposited on glass substrate using magnetron deposition technique and subsequent low-energy ion irradiation are studied. The optical spectroscopy demonstrated that the fabricated ensembles of silver NPs keep stable their plasmonic properties in an ambient atmosphere for at least 39 days due to their monocrystalline nature. Surface-enhanced Raman scattering (SERS) from Crystal Violet homogeneously adsorbed on these ensembles is characterized using Raman microscopy. It was found that the manufactured ensembles have a strong amplification factor, and this factor is preserved for these ensembles even after more than one month of storage in the surrounding atmosphere. Hereby, by using post-deposition ion irradiation it is possible to fabricate the silver NPs with stable plasmonic properties and form nanostructured surfaces with to be applied in sensor technologies and SERS.