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Peculiarities of the influence of nanostructuring of [SiO2/Si3N4]n multilayer membranes on its thermal and mechanical propertiesстатья Исследовательская статья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Дата последнего поиска статьи во внешних источниках: 17 июля 2020 г.
- Авторы: Glagolev P.Y., Ovodov A.I., Demin G.D., Djuzhev N.A., Nezhentsev A.V.
- Сборник: Proceedings of the 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2018
- Год издания: 2018
- Первая страница: 1984
- Последняя страница: 1988
- DOI: 10.1109/EIConRus.2018.8317500
- Аннотация: The effect of nanostructuring on the mechanical and thermal properties of [SiO2/Si3N4]n multilayer membranes, where n is the number of repetitions, was studied. It also was theoretically found that, when the membrane thickness is decreased, the mechanical deformation of the layers at a given pressure must take into account the transition from linear to nonlinear stress mechanism. This corresponds to the experimental results of testing the strength of round SiO2 (600 nm)/Si3N4 (130 nm)/SiO2 (400 nm)/SiaN4 (130 nm) multilayer membranes of different diameters of 1 mm, 1.4 mm, 1.8 mm respectively, within the measurement error. The good agreement between the numerical and analytical calculation of the equivalent heat capacity, thermal conductivity, and density of [SiO2/Si3N4]n multilayer membrane of different thickness and composition (for n = 8, 16, 28) is demonstrated. A decrease in the equivalent thermal conductivity of [SiO2/Si3N4]n membrane with increasing n is shown, which corresponds to the predominant heat propagation along the boundary of the layers. The results obtained can be used in the development of nanostructured [SiO2/Si3N4]n multilayer membranes for various applications, such as Micro-Electro-Mechanical Systems (MEMS), bio-, gas-, pressure-sensors, X-ray sources and ultra-strong thin coatings. © 2018 IEEE.
- Добавил в систему: Демин Глеб Дмитриевич