Evolution of Electron Temperature and Density Distributions in the Inter-Electrode Gap of DF CCP Discharge during the RF Periodтезисы доклада

Дата последнего поиска статьи во внешних источниках: 28 мая 2015 г.

Работа с тезисами доклада


[1] Evolution of electron temperature and density distributions in the inter-electrode gap of df ccp discharge during the rf period / O. V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. // Book of Abstracts of XXVIII International Conference on Phenomena in Ionized Gases. — Praha, 2007. — P. 2133–2136. The time-space resolved actinometry was applied for studying the evolution of electron temperature and density distributions in dual-frequency (1.76 MHz (LF) + 81 MHz (HF)) CCP discharge in Ar:O2 during the LF period. We used the fact that the intensity of oxygen atom emission O(3p(5)P-3p(5)S) at 777 nm in the low-pressure CCP discharge is mainly determined by the dissociative excitation of O2 with the ratio of intensities of the O atom emission to Ar(2p1−1s2) at 750 nm being approximately a linear function of electron temperature. It is shown that the LF power input into HF CCP discharge strongly disturbs uniform distributions of electron temperature and density in the inter-electrode gap. In DF CCP mode, strong electron heating is observed nearby the electrode sheaths synchronously with the LF period and penetrates deeply into the plasma bulk with increasing LF power.

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