Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogenстатья
Статья опубликована в высокорейтинговом журнале
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 26 августа 2016 г.
Авторы:
Astakhov D.I.,
Goedheer W.J.,
Lee C.J.,
Ivanov V.V.,
Krivtsun V.M.,
Koshelev K.N.,
Lopaev D.V.,
van der Horst R.M.,
Beckers J.,
Osorio E.A.,
Bijkerk F.
Аннотация:We used numerical modeling to study the evolution of EUV-induced plasmas in argon and
hydrogen. The results of simulations were compared to the electron densities measured by
microwave cavity resonance spectroscopy. It was found that the measured electron densities
can be used to derive the integral amount of plasma in the cavity. However, in some regimes,
the impact of the setup geometry, EUV spectrum, and EUV induced secondary emission
should be taken into account. The influence of these parameters on the generated plasma and
the measured electron density is discussed.