Actinometric method for measuring hydrogen-atom density in a glow discharge plasmaстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:The actinometric method is proposed for measuring the hydrogen-atom density in a plasma of self-sustained glow discharge in hydrogen and its mixtures with the use of Kr atoms as an actinometer of H atoms. The use of krypton for this purpose is advantageous over the commonly used argon actinometry. First, the excitation energies of the H(n = 3) and H(n = 4) levels almost coincide with the excitation energies of the Kr(5p') and Kr(6p) levels, respectively. Second, the wavelengths of the emission from the H(n = 4) and Kr(6p) levels lie in the range 420.0-490.0 nm, convenient for spectral analysis; moreover, these wavelengths are fairly close to each other, which makes the calibration of the optical system unnecessary when these levels are used for the actinometry. The electron excitation rate coefficients are calculated for the H, Kr, and Ar levels of interest, including the dissociative excitation of hydrogen atoms and stepwise excitation of krypton atoms. The applicability conditions of the actinometric technique are determined. it is shown that the ratios between the excitation rate coefficients of hydrogen and argon atoms depend on the reduced electric field, which complicates the measurements of the hydrogen-atom density when argon atoms are used as actinometer particles. The proposed technique is used to measure the hydrogen-atom density in a self-sustained glow discharge in an experiment on depositing diamond films with the use of CO + Kr + H-2 mixtures.