Measurement and modeling of a diamond deposition reactor: Hydrogen atom and electron number densities in an Ar/H-2 arc jet dischargeстатья

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[1] Measurement and modeling of a diamond deposition reactor: Hydrogen atom and electron number densities in an ar/h-2 arc jet discharge / C. J. Rennick, R. Engeln, J. A. Smith et al. // Journal of Applied Physics. — 2005. — Vol. 97, no. 11. — P. 113306. A combination of experiment [optical emission and cavity ring-down spectroscopy (CRDS) of electronically excited H atoms] and two-dimensional (2D) modeling has enabled a uniquely detailed characterization of the key properties of the Ar/H-2 plasma within a <= 10-kW, twin-nozzle dc arc jet reactor. The modeling provides a detailed description of the initial conditions in the primary torch head and of the subsequent expansion of the plasma into the lower pressure reactor chamber, where it forms a cylindrical plume of activated gas comprising mainly of Ar, Ar+, H, ArH+, and free electrons. Subsequent reactions lead to the formation of H-2 and electronically excited atoms, including H(n=2) and H(n=3) that radiate photons, giving the plume its characteristic intense emission. The modeling successfully reproduces the measured spatial distributions of H(n>1) atoms, and their variation with H-2 flow rate, F-H2(0). Computed H(n=2) number densities show near-quantitative agreement with CRDS measurements of H(n=2) absorption via the Balmer-beta transition, successfully capturing the observed decrease in H(n=2) density with increased F-H2(0). Stark broadening of the Balmer-beta transition depends upon the local electron density in close proximity to the H(n=2) atoms. The modeling reveals that, at low F-H2(0), the maxima in the electron and H(n=2) atom distributions occur in different spatial regions of the plume; direct analysis of the Stark broadening of the Balmer-beta line would thus lead to an underestimate of the peak electron density. The present study highlights the necessity of careful intercomparisons between quantitative experimental data and model predictions in the development of a numerical treatment of the arc jet plasma. The kinetic scheme used here succeeds in describing many disparate observations-e.g., electron and H(n=2) number densities, spatial distributions of optical emission from the plume, the variation of these quantities with added flow of H-2 and, when CH4 is added, absolute number densities and temperatures of radicals such as C-2 and CH. The remaining limitations of the model are discussed. (C) 2005 American Institute of Physics. [ DOI ]

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