Effect of the Temperature During Deposition of AlOx Films by Spray Pyrolysis on Their Passivating Properties in a Silicon Solar Cellстатья

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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.

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[1] Effect of the temperature during deposition of alox films by spray pyrolysis on their passivating properties in a silicon solar cell / G. G. Untila, T. N. Kost, A. B. Chebotareva et al. // Semiconductors. — 2012. — Vol. 46, no. 6. — P. 832–837. Abstract—The effect of the deposition temperature of AlOx in the range 330–530oC by spray pyrolysis on the rear surface parameters of silicon (n+pp+)Cz-Si/AlOx solar cells has been studied. It is found that, as the temperature of AlOx deposition is increased, all parameters of the rear surfaces decrease; e.g., the photocurrent density decreases from 25.4 to 24.1 mA/cm2; the photovoltage decreases from 611 to 598 mV; and the efficiency decreases from 12.2 to 10.9%. This indicates that passivation of the p+ type surface with AlOx films becomes less effective. It is concluded that, as the temperature of AlOx deposition is increased, the value of the positive charge incorporated into the nonstoichiometric interphase SiOx layer formed between c-Si and AlOx in the course of AlOx deposition, which brings about screening of the negative charge localized at the AlOx–SiOx interface and, respectively, a decrease in the field-induced passivation, increases. [ DOI ]

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