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Method for measuring the spatial characteristics of high-resolution diffraction gratingsстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 30 января 2019 г.
- Авторы: Shishova M.V., Odinokov S.B., Zherdev A.Y., Popov V.V.
- Журнал: Proceedings of SPIE - The International Society for Optical Engineering
- Том: 10818
- Год издания: 2018
- Издательство: SPIE, the International Society for Optical Engineering
- Местоположение издательства: Bellingham, WA, United States
- Первая страница: 108180J-1
- Последняя страница: 108180J-5
- DOI: 10.1117/12.2500899
- Аннотация: That paper focuses on indirect measurements of the diffraction gratings by analyzing their scattered distribution. The method is based on pre-calculated numerical dependencies of the energy characteristics. The comparison of measured diffraction efficiency values with numerical simulations provide the inverse measurements of the profile height. Presented research belongs to the field of scatterometry of high-resolution diffraction optical elements. The concept is tested with polymeric sinusoidal relief. Considered phase diffraction gratings have interest in field of linear displacement encoders. Keywords: diffraction grating, diffraction efficiency, RCWA, indirect measurements, scatterometry
- Добавил в систему: Попов Владимир Викторович