An automated apparatus for chemical vapor deposition of diamond films in a direct current dischargeстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Местоположение издательства:Road Town, United Kingdom
Первая страница:136
Последняя страница:140
Аннотация:An experimental automated apparatus for synthesizing polycrystal line diamond films on substrates with a diameter up to 60 mm by the chemical vapor deposition technique is described, A characteristic feature of the apparatus is a fully automated diamond-deposition process with PC-specified and automatically controlled parameters within required ranges, The apparatus makes it possible to operate simultaneously with six different gases and to set their flow rates independently within wide ranges. It is shown that the apparatus produces polycrystal diamond films with preassigned physical characteristics.