MEASUREMENTS OF SELF-DIFFUSION OF NI AND INTERDIFFUSION IN THIN-FILM AMORPHOUS NI-ZR USING RBSстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:An application of RBS, making possible simultaneous measurements of the self-diffusion and the interdiffusion coefficients, is demonstrated for amorphous Ni-Zr. Thin films with composition gradients were prepared by magnetron sputtering, film thickness being about 150 nm and composition variations between the surface and the bottom about 11 at.%. In the middle of the films, a thin layer enriched in Ni-62 was deposited without changing the constant composition gradient. By RBS, the interdiffusion coefficient was derived from the change of the slope of the concentration profile during annealing, utilizing a simple approximation to the solution to the diffusion equation. Due to the isotope enrichment, a dip and a peak appeared in the RBS Ni signal, and from their changes due to thermal annealing, the self-diffusion coefficient was evaluated by comparison with simulated RBS spectra employing the RUMP program. The data of independent measurements of the self-diffusion using SIMS agree with the RBS results. The simultaneous measurements of self-diffusion and interdiffusion also enables the determination of the thermodynamic factor.