ИСТИНА

Проект направлен на выявление механизмов формирования перспективных квазидвумерных материалов путем осаждения из активированной газовой фазы. Решение данной проблемы будет использоваться для разработки, создания и последующей оптимизации установки по газофазному химическому осаждению (Chemical Vapor Deposition - CVD), способной обеспечить контролируемое и воспроизводимое получения перспективных двумерных материалов, включая, дихалькогениды переходных металлов, графен и их производные.

Nowadays, due to the unique physicochemical properties, quasi-two-dimensional (2D) crystals attract significant interest as an object of fundamental scientific research and for various practical applications. In particular, such materials exhibiting 2D properties include transition metal dichalcogenides, graphene and their derivatives. One of the promising methods for the synthesis and modification of such materials is chemical vapor deposition (CVD). Despite the widespread use of this method, a number of fundamental scientific and technological problems related to the control of the activation degree of the gaseous medium, related to the influence of the state of the activated gaseous medium, as well as the properties and state of substrates on the formation of 2D materials, remain unresolved to date. In particular, due to insufficient knowledge of these issues, the CVD deposition method does not currently allow, with some exceptions, to achieve sufficient reproducibility of the materials, as well as their properties. Understanding the growth mechanisms will potentially solve the problem of the controlled production 2D crystals, as well as heterostructures based on them, with sizes, structural-morphological characteristics, and physical properties acceptable for technical applications. The project proposes a research program aimed at finding new solutions to these problems by developing and improving CVD equipment and methods that will ensure the precise supply of various precursors to the reaction chamber, as well as monitoring the state of the deposited films (up to atomic resolution) by introducing into the deposition zone scanning probe microscope, which allows obtaining data on the film without removal from the reaction chamber. In addition, the activated gaseous medium will be investigated by using the optical emission spectroscopy and, in some cases, previously developed machine learning methods will be applied to analyze these OES spectra. Patterns and relationships between parameters of the activated gas medium, the type, substrate conditions and the resulting unique materials will be revealed. As a result of project implementation, various materials will be synthesized, including graphene, molybdenum and tungsten disulfides, their derivatives, and heterostructures based on them. During the deposition, spectra and maps of main characteristics of activated gas medium will be recorded. The results will create a scientific basis for creating new or improving known technologies for creating promising 2D crystals by CVD.