Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structuresжурнал

Статьи, опубликованные в журнале

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  • 2022 Helium electron beam rf plasma for low-k surface functionalization
  • Voronina E.N., Sycheva A.A., Solovykh A.A., Proshina O.V., Rakhimova T.V., Palov A.P., Rakhimov A.T.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 40, № 6, с. 1-14 DOI
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  • 2019 Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity
  • Palov Alexander P., Baklanov Mikhail R., Shuhua Wei
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 37, с. 010601-1-010601-4 DOI
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  • 2017 Pore surface grafting of porous low-k dielectrics by selective polymers
  • Rezvanov Askar, Zhang Liping, Watanabe Mitsuhiro, Krishtab Mikhail B., Zhang Lin, Hacker Nigel, Verdonck Patrick, Armini Silvia, de Marneffe Jean-François G.N.G
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 35, № 2, с. 021211-021211 DOI
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  • 2016 Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach
  • Palov A.P., Voronina E.N., Rakhimova T.V., Lopaev D.V., Zyryanov S.M., Mankelevich Yu A., Krishtab M.B., Baklanov M.R.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 34, № 4, с. 041205 DOI
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  • 2015 Dependence of dielectric constant of SiOCH low-k films on porosity and pore size
  • Palov Alexander, Rakhimova Tatiana V., Krishtab Mikhail B., Baklanov Mikhail R.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 33, № 2, с. 020603-020605 DOI
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  • 2012 Emission properties of carbon nanowalls on porous silicon
  • Evlashin Stanislav A., Mankelevich Yuri A., Borisov Vladimir V., Pilevskii Andrey A., Stepanov Anton S., Krivchenko Victor A., Suetin Nikolai V., Alexander T Rakhimov
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 30, № 2, с. 021801 DOI
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  • 2011 Mueller polarimetry as a tool for detecting asymmetry in diffraction grating profiles
  • Novikova T., Bulkin P., Popov V., Haj Ibrahim B., De Martino A.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 29, № 5, с. 051804-1-051804-6 DOI
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  • 2010 Simulation of scanning electron microscope images taking into account local and global electromagnetic fields
  • Babin S., Borisov S., Ito H., Ivanchikov A., Suzuki M.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 28, с. C6C41
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  • 2009 Contrast reversal effect in scanning electron microscopy due to charging
  • Abe H., Babin S., Borisov S., Hamaguchi A., Kadowaki M., Miyano Y., Yamazaki Y.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 27, с. 1039-1046
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  • 2007 Direct-write trilayer technology for Al-Al2O3-Cu superconductor-insulator-normal metal tunnel junction fabrication
  • Otto Ernst, Tarasov Mikhail, Kuzmin Leonid
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 25, № 4, с. 1156-1160 DOI
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  • 2007 Remarkably efficient acid generation in chemically amplified resist from quantum chemistry modeling
  • Granovsky Alex A., Bochenkova Anastasia V., Suetin Nikolay, Fryer David, Singh Vivek
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 25, № 1, с. 58-68 DOI
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  • 2004 Thermal analysis of diamondlike carbon membrane masks in projection electron-beam lithography
  • Babin S., Butomo V., Kuzmin I.Yu, Yamashita H., Yamabe M.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 22, № 6, с. 3082-3086
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  • 2003 Single electron transistors with Nb/AlOx/Nb junctions
  • Dolata R., Scherer H., Zorin A.B., Niemeyer J.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 21, с. 775-780
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  • 2003 Thermal analysis of projection electron beam lithography using complementary mask exposures
  • Babin S., Kuzmin I., Yamashita H., Yamabe M.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 21, № 6, с. 2691-2696
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  • 2002 Atomic resolution imaging of a single-crystal Cu (100) surface by scanning tunneling microscopy in ultrahigh vacuum at room temperature
  • Zou Z.Q., Dong Z.C., Trifonov A.S., Nejo H.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 20, № 4, с. 1567-1569 DOI
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  • 2002 Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy
  • Huang S.M., Hong M.H., Luk’yanchuk B.S., Lu Y.F., Song W.D., Chong T.C.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 20, № 3, с. 1118 DOI
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  • 2000 Aligned carbon nanotube films for cold cathode applications
  • Obraztsov A.N., Pavlovsky I., Volkov A.P., Obraztsova E.D., Chuvilin A.L., Kuznetsov V.L.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 18, № 2, с. 1059-1063 DOI
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  • 2000 Scanning tunneling microscope study of diamond films for electron field emission
  • Rakhimov A.T., Suetin N.V., Soldatov E.S., Timofeyev M.A., Trifonov A.S., Khanin V.V., Silzars A.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 18, № 1, с. 76-81 DOI
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  • 1999 Fabrication and characterization of chromium based single-electron transistors with evaporated chromium oxide barrier tunnel junctions
  • Pashkin Y.A., Pekola J.P., Kuzmin L.S.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 17, № 4, с. 1413-1416 DOI
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  • 1999 Low-voltage electron emission from chemical vapor deposition graphite films
  • Obraztsov A.N., Pavlovsky I.Y., Volkov A.P.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 17, № 2, с. 674-678 DOI
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  • 1999 Multilayer techinque for fabricating Nb junction circuits exhibiting charging effects
  • Pavolotsky A.V., Weimann Th, Scherer H., Krupenin V.A., Niemeyer J., Zorin A.B.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 17, № 1, с. 230-232 DOI
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  • 1998 Experimental verification of the TEMPTATION (temperature simulation) software tool
  • Babin S., Kuzmin I.Yu
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 16, № 6, с. 3241-3247
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  • 1997 Interfaces of strained layer (GenSim)p superlattices studied by second-harmonic generation
  • Xiao X., Zhang C., Fedotov A.B., Chen Z., Loy M.M.T
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 15, № 4, с. 1112-1116 DOI
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  • 1994 Ex-situ scanning-tunneling-microscopy investigations of the modification of titanium surface due to corrosion processes
  • Ejov A.A., Savinov S.V., Yaminsky I.V., Pan J., Leygraf C., Thierry D.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 12, № 3, с. 1547-1550 DOI
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  • 1994 Surface relaxation of nickel single crystal near the Curie temperature
  • Kuvakin M.V., Yurasova V.E., Motaweh H.
  • в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 45, № 1, с. 45-47