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Интеллектуальная Система Тематического Исследования НАукометрических данных |
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Experimental measurements of current-voltage relationship in RF CCP discharge in argon at 81 MHz have been performed by planar Langmuir probe. The high plasma density 1010 – 1011 cm-3 has been estimated at specific input power under study. The 2D numerical model of ion current collection by a planar probe has been developed on the base of the particle-in-cell with Monte-Carlo collision method for ions motion. This model is used to reveal the plasma density from ion part of I-V curve and effects of ion collisions.