ИСТИНА

In this work, the two-dimensional model of inductively coupled plasma discharge in oxygen was developed. The model includes hydrodynamic equations in drift-diffusion approximation for describing the kinetics of charged (electrons and ions) and neutral plasma particles, Maxwell’s equations for electromagnetic fields, and equations for the temperature and neutral gas flow as well as a detailed scheme of plasma-chemical reactions. The model was tested against theoretical and experimental data in a simple cylindrical chamber. The electron density and temperature distributions were obtained over a wide range of powers deposited in the plasma (100 – 500 W) and compared with literature data. Also, the complete scheme of the vibrational kinetics of O2 molecules was included in the model. The vibrational distribution function was calculated in low-pressure inductive discharge as well as spatial distributions of plasma parameters (density and temperature of electrons, excited components, neutral gas temperature, etc.) and flows of charged and active neutral particles at the reactor walls.