ИСТИНА

Modeling the processes of forming contact regions (interface) of the multilayer niobium-cobalt nanosystem is carried out. The morphology and composition of a multilayer nanosystem interface is investigated. The layer boundaries morphology is shown to depend on the deposition substrate temperature and, largely, is determined by preparing the surface for deposition. The work considers the deposition surface modification by removing its defects. Simulation showed that surface preparation significantly affects the morphology and composition of a multilayer nanosystem interface, depending on the type of deposited atoms and atoms forming the deposition surface.