ИСТИНА

Holographic imaging approach is widely known for the ability to record and restore optical information about 3D objects using flat media. Sub-Wavelength Holographic Lithography (SWHL) technology is based on computer synthesis of holographic masks for complex images with sub-wavelength elements in lensless Fourier holographic layout. We have developed special structures of holographic masks, including pure phase, methods for images scaling and overlapping, effective algorithms for computer synthesis and optimization of holographic masks and images reconstruction. Experimental setup was produced to verify applied physical concepts and mathematical models (Fig. 1). Simple chrome-on-quartz holographic mask was produced for 2,5x2,5mm2 image on multi-plane surface (Fig. 2). Transmission distribution on mask was implemented by set of apertures of square form with varying sizes and with centers in nodes of a uniform rectangular grid. Grid step is 2µm, mask radius is 21.75mm, minimal transmission zone size is 0.75072µm, maximal transmission zone size is 1.9µm. He-Cd laser HCL-100V(I) is used as a light source with wavelength 441,6nm for mask exposure. CMOS camera Basler daA2500-14um with 2592х1944 resolution, 2.2х2.2μm2 pixel size was used for image registration. The image was transferred on the camera through the optical system with magnification of 20x.