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Интеллектуальная Система Тематического Исследования НАукометрических данных |
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The method of plasma electron spectroscopy (PLES) was started in the 1970s and later was developed as a branch of plasma chemistry [1]. The method of PLES [2] enables identification of gas impurities in a main gas in collision regime of movement of the particles at moderate low pressures (units of Torr). The identification of atoms and molecules of the impurities is performed by selective registration of groups of fast electrons produced by Penning ionization [3] of the impurities by meta-stable helium atoms in the plasma of a stationary short discharge. We hope the method will be practically implemented for gas analyses