ИСТИНА

The tendencies of development for modern control and management systems testify to the growing urgency of using converters physical quantities. The primary element of monitoring and control systems that supplies data for pressure of gas and liquid are the pressure sensors (PS). Since the 60s of the last century and up to date the most common principle of sensing element (SE) functioning is the mechanism of the tensoresistive effect in semiconductor structures (silicon die). SE of PS is formed using microelectromechanical system (MEMS) technology. The electrical circuit measurements signal by pressure is represented in the form of strain-sensitive Wheatstone bridge, which made by four strain-sensitive resistors. In the presented development of SE is formed from not only passive components in the form of p-type resistors, but also active – vertical n-p-n bipolar transistors. SE has the electrical circuit of strain-sensitive differential amplifier (PSDA). PSDA can significantly increase the output sensitivity by respect to Wheatstone bridge.