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Интеллектуальная Система Тематического Исследования НАукометрических данных |
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On summarizing the results, microscopically etched thick films of a-Si seem to form an irregular net. We supposed a gas model for pore spatial distribution and a crystal model for cluster-like particles. Columnar domain shape looks like a prism of 200-300 nm in length and up to 40–80 nm in diameter.