Ion-beam methods of the accelerator complex HVEE-500 SINP MSUстатья
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Дата последнего поиска статьи во внешних источниках: 28 мая 2015 г.
Аннотация:Description of commissioned experimental complex HVEE-500 SINP MSU, allowing to explore the surface and thin films with a resolution by the depth of up to 1-2 monolayers. The complex provides for the possibility of in situ experiments on the interaction of ion beams with coatings and study them with the use of ion beam techniques. Implantation of ions from 1 to 250 atomic mass units is performed in the target dimensions up 150x150 mm with homogeneity dose of this area no less 99%.