Advanced algorithms for monochromatic monitoring of complex optical coatingsстатья
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Дата последнего поиска статьи во внешних источниках: 15 февраля 2024 г.
Аннотация:The paper proposes to use combinations of two algorithms for the on-line prediction of the termination times oflayer depositions in the case of complex optical coatings with large numbers of layers with significantly differentlayer thicknesses. Notch filters with very thin and thick coating layers are considered as examples of coatings wheresuch combinations of algorithms can be useful. Computational manufacturing experiments are used to estimateexpected levels of thickness errors and the strength of the error self-compensation effect for various notch filterdesigns. It is shown that the estimates obtained can be used to select the optimal combination of the considered algorithms.