Designing a scanning probe microscope for in situ study of carbon materials growth processes during chemical vapor depositionстатья
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Дата последнего поиска статьи во внешних источниках: 24 июня 2017 г.
Авторы:
Artem Borisovich Loginov ,
Rinat Ramilovich Ismagilov
Журнал:
Journal of Nanophotonics
Том:
11
Номер:
3
Год издания:
2017
Издательство:
Society of Photo-Optical Instrumentation Engineers
Местоположение издательства:
United States
Первая страница:
032509-1
Последняя страница:
032509-7
DOI:
10.1117/1.JNP.11.032509
Аннотация:
Abstract. The development of methods for in situ analysis is required to provide deeper understanding
of carbon film materials formation during chemical vapor deposition (CVD). Here, we
describe scanning probe microscope instrument designed for study of nucleation and growth of
thin film materials obtained by carbon condensation from a hydrogen/methane gas mixture activated
by the “hot filament” method. The microscope allows measurements of topology characteristics,
width of band gap, Fermi level position, and electrical conductivity of the carbon
film material during its formation in the CVD process. We present the design and the characteristics
of the microscope in this paper. © 2017 Society of Photo-Optical Instrumentation Engineers
(SPIE) [DOI: 10.1117/1.JNP.11.032509]
Добавил в систему:
Логинов Артем Борисович